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Quartz Clean

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Submitted By kjk1955
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Quartz Cleaning for ASHER Parts

Objective: To try implement a clean procedure for the quartz ware for the wets department Ashers to reduce cost.

I. .Using my previous work experience I knew that the quartz parts could be cleaned and used at least once.

II. I advised tool reps what my intentions were for the dirty quartz parts, and asked them if they had any recommendations for cleaning.

III. Axcelis provided me with their recommended procedure. a. Recommended cleaning solution (5% Hydrofluoric Acid) b. Recommended Rinse – (DI Water) c. Immerse parts for 5 minutes in 5% solution of Hydrofluoric Acid and rinse thoroughly.

IV. I worked with engineering on developing a proper recipe to use in our Quartz Cleaner. a. Wrote a recipe to use the 5% HF acid solution, 5 minute soak and 10 minute rinse. b. Cleaned a dirty Quartz Orifice window out of ASH and it came out as good as new.

V. Projected Cost savings cleaning only once per Axcelis Asher.

|Part Name
|Baffle Plate 8 inch |
|Lower Quartz Window
|Baffle Plate
|Quartz cooling tube
|Pin Quartz
|Orifice Window
|

VI. Conclusion: We are currently changing out all of the quartz ware on an Annual Pm which cost $15,394.61 per chamber on the Axcelis tools. If we were to move to cleaning our quartz ware instead of disposing after one use we could potentially save $30,789.22 per Asher tool. This would mean with having (4) ES3 Ashers this would be a total savings of $123,156.88 per year. We will have more tools in the future and the savings will only grow not including if we look at this on a global scale. The only down fall is that we can only use the cleaning procedure once due to Hydrofluoric Acid etching the quartz.

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